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ARRAYS OF MICRO-PRISMS AND MICRO-MIRRORS FOR INFRARED LIGHT BASED ON As2S3-As2Se3 PHOTORESISTS

N. P. Eisenberg1, M. Manevich1, A. Arsh2, M. Klebanov2, V. Lyubin2,*

Affiliation

  1. Jerusalem College of Technology, Jerusalem 91160, Israel
  2. Ben-Gurion University of the Negev, Beer-Sheva 84105, Israel

Abstract

New micro-optical elements, arrays of micro-prisms and micro-mirrors for infra-red light with a wide variation of their parameters were fabricated. These results were obtained with a three-component As-S-Se chalcogenide photoresist and a new efficient amine-based selective developer..

Keywords

Micro-prism aray, Micro-mirror array, Infrared, As2S3-As2Se3 photoresist.

Submitted at: Aug. 26, 2005
Accepted at: Sept. 22, 2005

Citation

N. P. Eisenberg, M. Manevich, A. Arsh, M. Klebanov, V. Lyubin, ARRAYS OF MICRO-PRISMS AND MICRO-MIRRORS FOR INFRARED LIGHT BASED ON As2S3-As2Se3 PHOTORESISTS, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 5, pp. 2275-2280 (2005)