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CHARACTERIZATION OF A SURFACE-WAVE SUSTAINED PLASMA DISCHARGE IN A CO-AXIAL STRUCTURE

S. Letout1,2,* , L. L. Alves2, C. Boisse-Laporte1, P. Leprince1

Affiliation

  1. Laboratoire de Physique des Gaz et Plasmas, Université Paris-Sud, 91405 Orsay Cedex, France
  2. Centro de Física dos Plasmas, Instituto Superior Técnico, 1049-001 Lisboa, Portugal

Abstract

The present work introduces the preliminary experimental characterization of a low-pressure microwave discharge in a coaxial structure. The discharge radial description is simulated using a 1D-moment method code, which couples particle and energy transport to the field distribution and Poisson's equations. Cylindrical Langmuir probe and emission spectroscopy measurements are used to give a spatial description of the high-density plasma. The effects on probe characteristics of the high-intensity resonance field are mentionned. Radial profiles are compared to numerical simulations..

Keywords

Plasma, Microwave, Surface Wave, Electron-Plasma Resonance, Langmuir Probe, Emission Spectroscopy, Self-Consistent Moment Method Simulation.

Submitted at: April 1, 2005
Accepted at: Sept. 22, 2005

Citation

S. Letout, L. L. Alves, C. Boisse-Laporte, P. Leprince, CHARACTERIZATION OF A SURFACE-WAVE SUSTAINED PLASMA DISCHARGE IN A CO-AXIAL STRUCTURE, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 5, pp. 2471-2475 (2005)