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Diode pumped Q-switched Nd:YAG laser at 1064 nm with nearly diffraction limited output beam for precise micromachining of natural diamond for micro electro mechanical systems (MEMS) applications

S. K. SUDHEER1,* , V. P. MAHADEVAN PILLAI1, V. U. NAYAR1

Affiliation

  1. Department of Optoelectronics, University of Kerala, Kariavattom, Thiruvananthapuram-695581, Kerala, India

Abstract

In the present investigation, a diode pumped Q-switched Nd:YAG laser is used to study the various aspects of natural gem quality natural diamond processing for MEMS applications. The experimental setup consists of a diode pumped Q-Switched Nd:YAG laser capable of operating at wavelength 1064 nm. The diamond cutting is performed by making the “V” shaped groove with various opening angle. The variation of weight loss of diamond during cutting are noted for both lamp pumped Nd:YAG laser as wel as for diode pumped Nd:YAG laser. The cut surface morphology, elemental and structural analysis of graphite formed during processing in both the cases are compared using EDAX and XRD techniques. The diode pumped Q-Switched Nd:YAG laser have shown very good performance in terms of peak to peak out put stability, minimal spot diameter, smaler divergence angle, higher peak power in Q-Switched mode and good fundamental TEM00 mode quality for processing natural diamond stones. Less weight loss, less micro cracking and good surface quality of diamonds are achieved in this case..

Keywords

Single crystal diamond, Diode pumped Nd:YAG laser, Wide band gap (WBG) Materials, Micro electro mechanical systems, Q-Switched Nd:YAG laser, V-shaped groove, Weight loss.

Submitted at: Nov. 10, 2005
Accepted at: Jan. 26, 2006

Citation

S. K. SUDHEER, V. P. MAHADEVAN PILLAI, V. U. NAYAR, Diode pumped Q-switched Nd:YAG laser at 1064 nm with nearly diffraction limited output beam for precise micromachining of natural diamond for micro electro mechanical systems (MEMS) applications, Journal of Optoelectronics and Advanced Materials Vol. 8, Iss. 1, pp. 363-367 (2006)