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High-resolution periodical structure on polycarbonate using holographic interferometry and electroforming process

WEN-CHUNG CHANG1,* , WEI-CHING CHUANG2, CHI-TING HO3, KAO-FENG YARN4

Affiliation

  1. Department of Electronic Engineering, Southern Taiwan University of Technology, Tainan 710, Taiwan, ROC
  2. Department of Electro-Optics Engineering, National Formosa University, Huwei, Yulin, Taiwan, ROC
  3. Department of Mechanical Design Engineering, National Formosa University, Huwei, Yulin, Taiwan, ROC
  4. Department of Electronic Engineering, Far East College, Tainan 744, Taiwan, ROC

Abstract

A procedure for prototyping a periodic structure on polycarbonate at submicron order using holographic interferometry and electroplating metal molding processes is demonstrated. The holographic interference using a He-Cd (325nm) laser was first used to create periodic line structure on an i-line sub-micron positive photoresist film. Pattern was then transferred to a metal mold using Nickel-Cobalt electroforming. Final line pattern on a polycarbonate thin film was formed from the metal mold using a hot press machine. The technique allows for accurate control for the transfer of a grating period and depth. The grating pattern on the polycarbonate polymer produced by the metal mold gives an average error of less than 1.7% in the grating period and an average error of 5.7% for depth reproduction..

Keywords

Polycarbonate, Holographic interferometry, Submicron grating.

Submitted at: May 5, 2006
Accepted at: May 18, 2006

Citation

WEN-CHUNG CHANG, WEI-CHING CHUANG, CHI-TING HO, KAO-FENG YARN, High-resolution periodical structure on polycarbonate using holographic interferometry and electroforming process, Journal of Optoelectronics and Advanced Materials Vol. 8, Iss. 3, pp. 1243-1246 (2006)