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INFLUENCE OF COMPOSITION, EXPOSURE AND THERMAL ANNEALING ON OPTICAL PROPERTIES OF As-S CHALCOGENIDE THIN FILMS

I. Ohlídal1,* , D. Franta2, M. Frumar3, J. Jedeleský1, J. Omasta1

Affiliation

  1. Department of Physical Electronics, Faculty of Science, Masaryk University, Kotláská 2, 611 37 Brno, Czech Republic
  2. Laboratory of Plasma Physics and Plasma Sources, Faculty of Science, University, Kotláská 2, 611 37 Brno, Czech Republic
  3. Department of General and Inorganic Chemistry, Faculty of Chemical Technology, University of Pardubice, Legions Sq. 565, 532 10 Pardubice, Czech Republic

Abstract

In this paper the influence of the composition, i.e., As concentration, UV irradiation and annealing, on the optical constants, thikness and material parameters of chalcogenide As-S thin films is studied. For determining the values of the parameters mentioned the optical method based on interpretation of experimental data consisting of spectral dependences of the transmitance measured at normal incidence and spectral dependences of the ellipsometric quantities measured for several incidence angles is used. This combined optical method is applied in multi-sample modification. Experimental data are measured in the spectral region 240-850 nm. In the frame of the interpretation of the experimental data, the structural model containing an isotropic inhomogeneous layer covered with a non-absorbing overlayer is used for representation of the films under investigation. The Jelison-Modine (Tauc-Lorentz) dispersion model is employed for expressing the spectral dependences of the optical constants of the As-S Films. It is shown that this dispersion model is suitable for interpretation of the ellipsometric data but it is insufficient for treatment of the transmittance data. Further, it is shown that the changes of composition, exposure and annealing influence markedly the material parameters and thicknesses of the As-S films..

Keywords

As-S chalcogenide films, Ellipsometry, Transmission, Optical constants.

Submitted at: Dec. 12, 2003
Accepted at: March 15, 2004

Citation

I. Ohlídal, D. Franta, M. Frumar, J. Jedeleský, J. Omasta, INFLUENCE OF COMPOSITION, EXPOSURE AND THERMAL ANNEALING ON OPTICAL PROPERTIES OF As-S CHALCOGENIDE THIN FILMS, Journal of Optoelectronics and Advanced Materials Vol. 6, Iss. 1, pp. 139-148 (2004)