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IONIZING ROLE PLAYED BY ATOMIC METASTABLE SPECIES IN RF PLASMA MODULATED BY SHORT HIGH CURRENT PULSED DISCHARGES

C. Diplasu1, A. Surmeian1,* , H. Fujita2

Affiliation

  1. Institute of Atomic Physics-INFLPR, P.O.Box MG 36, R-76900, Bucharest, Romania
  2. Department of Electrical and Electronic Engineering, Saga University, Saga 840-8502, Honjo-machi 1, Japan

Abstract

Langmuir probe measurements were used to demonstrate the ionizing role of atomic metastables in inductively coupled rf plasma modulated by short high current pulsed discharges. Transient plasma generated in gases without metastable levels (H2) decays much faster than that generated in gases having atomic metastable levels (Xe, Ar and Ne)..

Keywords

Modulated radio-frequency plasma, Metastables, Pulsed discharges, Langmuir probes.

Submitted at: Sept. 21, 2005
Accepted at: Sept. 22, 2005

Citation

C. Diplasu, A. Surmeian, H. Fujita, IONIZING ROLE PLAYED BY ATOMIC METASTABLE SPECIES IN RF PLASMA MODULATED BY SHORT HIGH CURRENT PULSED DISCHARGES, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 5, pp. 2397-2400 (2005)