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MAGNETIC, ELECTRICAL AND STRUCTURAL PROPERTIES OF GRANULAR [FeCoB/(SiO2)]···· n THIN FILMS

M. Urse1,* , A.-E. Moga1, M. Grigoras1, H. Chiriac1

Affiliation

  1. National Institute of R & D for Technical Physics, 47 Mangeron Blvd., 700050 Iasi, Romania

Abstract

The granular metal – insulator films are composite materials consisting of metallic nanograins embedded in an insulating matrix. The ferromagnetic metal – insulator thin films with very high electrical resistivity are an excelent candidate for high permeability cores in thin film inductors which operate at high frequencies. A source of losses are eddy currents in the magnetic layers. A possible way to reduce these losses is to fabricate the magnetic/dielectric multilayers. This paper reports some results concerning the influence of the FeCoB and SiO2 layers composition and annealing temperature on the resistive, magnetic and microstructural properties of [FeCoB/(SiO2)]·n multilayer thin films. As compared to the well known FeCoB alloys, widely used in the electromagnetic micro-devices which can operate at high frequencies, the [FeCoB/(SiO2)]·n (n 30) thin films exhibit high resistivity over 8 · 10-3 mWm while superior soft magnetic properties specific for FeCoB thin films are maintained. The [FeCoB/(SiO2)]·60 thin films after annealing at 300 oC show good resistive and magnetic properties of the resistivity r @ 49 mW m, saturation magnetization Ms @ 149 emu/g and coercive field Hc @ 7 Oe..

Keywords

Granular structure, Thin film inductors, Multilayer, High frequencies, Electrical and magnetic properties.

Submitted at: April 20, 2004
Accepted at: June 22, 2004

Citation

M. Urse, A.-E. Moga, M. Grigoras, H. Chiriac, MAGNETIC, ELECTRICAL AND STRUCTURAL PROPERTIES OF GRANULAR [FeCoB/(SiO2)]···· n THIN FILMS, Journal of Optoelectronics and Advanced Materials Vol. 6, Iss. 3, pp. 943-946 (2004)