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METHODS FOR PREPARATION OF BaTiO3 THIN FILMS

M. Cernea1,*

Affiliation

  1. National Institute R&D of Materials Physics, PO BOX MG-7, Bucharest, RO-77125, Romania

Abstract

Chemical, physical and electrochemical general methods used for deposition of various materials were tested for preparation of BaTiO3 films. Researchers are focusing on the influence of processing parameters on the stoichiometry and the properties of BaTiO3 films for each deposition method. Dielectric properties of BaTiO3 thin films prepared by different methods shown various values suggesting that the optimal parameters for deposition of BaTiO3 be not well known. Great efforts are concentrated on the economical aspect of the deposition process. In the case of BaTiO3 films, it is important to prepare crystallized films at low temperatures. The methods for deposition of BaTiO3 look into and develop continuous due to increase of the domain to use of BaTiO3 films..

Keywords

Barium titanate, Thin film, Deposition methods.

Submitted at: Sept. 2, 2004
Accepted at: Dec. 6, 2004

Citation

M. Cernea, METHODS FOR PREPARATION OF BaTiO3 THIN FILMS, Journal of Optoelectronics and Advanced Materials Vol. 6, Iss. 4, pp. 1349-1356 (2004)