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NANO-SCULPTURED THIN FILM THICKNESS VARIATION WITH INCIDENCE ANGLE

C. Buzea1,* , K. Robbie1

Affiliation

  1. Department of Physics & Centre for Manufacturing of Advanced Ceramics and Nanomaterials, Queen's University, Kingston, Ontario, Canada

Abstract

In-situ monitoring and calibration of nano-sculptured thin film thickness is a critical problem due to substrate tilt angle dependent porosity and mass flux. In this letter we present an analytical model for thickness dependence on fabrication parameters for nano-sculptured films. The generality of the model includes universal Gaussian-type flux distribution, non unity sticking coefficients, variable off-axis sensor location, and substrate tilt. The resulting equation fits well the experimental data. The results can be particularized for films deposited at normal incidence..

Keywords

Nano-sculptured films, Glacing angle deposition.

Submitted at: Oct. 18, 2004
Accepted at: Dec. 6, 2004

Citation

C. Buzea, K. Robbie, NANO-SCULPTURED THIN FILM THICKNESS VARIATION WITH INCIDENCE ANGLE, Journal of Optoelectronics and Advanced Materials Vol. 6, Iss. 4, pp. 1263-1268 (2004)