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ON THE DETERMINATION OF THE OPTICAL CONSTANTS OF VERY THIN (λλλλ/50) FILMS

P. Gushterova1,* , P. Sharlandjiev1, B. Schmidt2, M. Pham2

Affiliation

  1. Central Laboratory for Optical Storage and Processing of Information, Bulgarian Academy of Sciences, “Acad. G. Bontchev” Str., Bl. 101, Sofia 1113, Bulgaria
  2. Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, POB 51 01 19, 01314 Dresden, Germany

Abstract

The improvement of a recently developed spectrophotometric method for the determination of the complex refractive index (ñ) and physical thickness (d) of very thin films (d ≅ λ/50, λ is the wavelength in the visible and near infrared) is presented. The thin film transmittance (Tf), front side reflectance (Rf) and back side reflectance (R′f) are used for the estimation of (ñ, d). Utilizing the nanothickness of the films, we derive analytical expressions for Rf, R′f and Tf, by development of the Abelès characteristic matrix elements up to the 4th order in ñd/λ. An optimization procedure is used to estimate (ñ, d). Thus, the problem related to multiple or lack of solutions is overcome. The method is applied to Au films, deposited on transparent glass substrates. For comparison of the resulting (ñ, d), Veritable Angle Spectroscopic Ellipsometry is used as an independent technique..

Keywords

Nanofilms, Optical constants, Au films.

Submitted at: Dec. 9, 2004
Accepted at: Jan. 26, 2005

Citation

P. Gushterova, P. Sharlandjiev, B. Schmidt, M. Pham, ON THE DETERMINATION OF THE OPTICAL CONSTANTS OF VERY THIN (λλλλ/50) FILMS, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 1, pp. 305-308 (2005)