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ON THE SECONDARY ELECTRON EMISSION IN DC MAGNETRON DISCHARGE

C. Costin1,* , G. Popa1, G. Gousset2

Affiliation

  1. Faculty of Physics, Al. I. Cuza University, 11 Carol I Blvd., 700506 Iasi, Romania
  2. Laboratoire de Physique des Gaz et des Plasmas, Université Paris Sud XI, Bât. 210, 91405 Orsay Cedex, France

Abstract

The presence of a curved magnetic field in the vicinity of a surface can drastically influence the secondary electron emission induced by ion impact. This phenomenon was studied for the metallic cathode of a DC planar magnetron discharge. The spatial dependence of the secondary electron emission coefficient is obtained from the boundary conditions imposed for particle fluxes in two-dimensional fluid model. The effect of the gas pressure, magnetic field strength magnitude and orientation upon the coefficient of the secondary emission is discussed. The contribution of the electron reflection on the surface is also investigated..

Keywords

Secondary electron emission, Magnetron discharge, Fluid model, Numerical modelling.

Submitted at: Jan. 21, 2005
Accepted at: Sept. 22, 2005

Citation

C. Costin, G. Popa, G. Gousset, ON THE SECONDARY ELECTRON EMISSION IN DC MAGNETRON DISCHARGE, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 5, pp. 2465-2469 (2005)