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OPTICAL PROPERTIES OF DIAMOND-LIKE CARBON AND NANOCRYSTALLINE DIAMOND FILMS

B. Mednikarov1,* , G. Spasov1, Tz. Babeva1, J. Pirov1, M. Sahatchieva1, C. Popov2, W. Kulisch2

Affiliation

  1. Central Laboratory of Photoprocesses, Bulgarian Academy of Sciences, Acad. G. Bonchev St. Bl. 109, 1113 Sofia, Bulgaria
  2. University of Kassel, Institute of Microstructure Technologies and Analytics (IMA), Heinrich-Plett-Str. 40, 34132 Kassel, Germany

Abstract

Thin diamond-like carbon (DLC) coatings deposited by DC or RF magnetron sputtering of a graphite target in argon/methane ambients, and nanocrystalline diamond/amorphous carbon (NCD/a-C) films prepared by microwave plasma chemical vapour deposition (MWCVD) from methane/nitrogen mixtures were investigated with respect to their basic and optical properties. The influence of the process parameters on the growth rate, morphology, topography and chemical bonding structure of the films was studied and correlated with the results concerning the transmittance, reflectance, refractive index and extinction coefficient of the layers..

Keywords

Diamond-like carbon, Nanocrystalline diamond, Optical properties.

Submitted at: April 25, 2005
Accepted at: May 26, 2005

Citation

B. Mednikarov, G. Spasov, Tz. Babeva, J. Pirov, M. Sahatchieva, C. Popov, W. Kulisch, OPTICAL PROPERTIES OF DIAMOND-LIKE CARBON AND NANOCRYSTALLINE DIAMOND FILMS, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 3, pp. 1407-1413 (2005)