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Optical properties of PECVD deposited DLC films prepared with air addition

S. S. TINCHEV1,* , Y. DYULGERSKA1, P. NIKOLOVA1, D. GRAMBOLE2, U. KREISSIG2, TZ. BABEVA3

Affiliation

  1. Institute of Electronics, Bulgarian Academy of Sciences, Tzarigradsko Chaussee 72, Sofia 1784, Bulgaria
  2. Forschungszentrum Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, P. O. Box 51 01 19, D-01314 Dresden, Germany
  3. Central Laboratory of Photoprocesses, Bulgarian Academy of Sciences, Acad. G. Bonchev str., bl. 109, 1113 Sofia, Bulgaria

Abstract

Diamond-like carbon (DLC) films with addition of atmospheric air to benzene were prepared by DC discharge plasma enhanced chemical vapor deposition (PECVD). These films were compared with films made from benzene/argon mixture. Some properties of the films including their optical transmission, hydrogen content and Raman spectra were investigated. It was found that such films fabricated with air addition (even at low vacuum) exhibit properties suitable for optical applications..

Keywords

Diamond-like carbon, Thin films, PECVD.

Submitted at: Nov. 22, 2005
Accepted at: Jan. 26, 2006

Citation

S. S. TINCHEV, Y. DYULGERSKA, P. NIKOLOVA, D. GRAMBOLE, U. KREISSIG, TZ. BABEVA, Optical properties of PECVD deposited DLC films prepared with air addition, Journal of Optoelectronics and Advanced Materials Vol. 8, Iss. 1, pp. 308-311 (2006)