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PARTICLE MODELLING OF PARALLEL PLATE RADIO FREQUENCY DISCHARGE PLASMAS IN HYDROGEN: INFLUENCE OF PRESSURE

P. Diomede1,* , S. Longo1,2, M. Capitelli1,2

Affiliation

  1. Dipartimento di Chimica dell'Universita' di Bari, Via Orabona 4, 70126 Bari, Italy
  2. IMIP/CNR, Via Orabona 4, 70126 Bari, Italy

Abstract

We present a 1.5D particle code for the modelling of parallel plate, capacitively coupled radio frequency discharge plasmas in hydrogen, which includes a rigorous kinetic modelling of ion transport and several solutions to speed up the convergence. In a test case the effect of pressure on the kinetics of charged particles and the plasma potential is analyzed. The relevance of the results of this kind of studies for material science is discussed..

Keywords

Radio frequency discharge plasma, Pressure effect.

Submitted at: Jan. 10, 2005
Accepted at: Sept. 22, 2005

Citation

P. Diomede, S. Longo, M. Capitelli, PARTICLE MODELLING OF PARALLEL PLATE RADIO FREQUENCY DISCHARGE PLASMAS IN HYDROGEN: INFLUENCE OF PRESSURE, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 5, pp. 2363-2369 (2005)