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Raman spectra of carbon thin films

G. MUSA1,2, R. VLADOIU1,* , V. CIUPINA1, J. JANIK3

Affiliation

  1. Department of Physics, Ovidius University, Mamaia 124, 900527, Constanta, Romania
  2. National Institute for Laser, Plasma and Radiation Physics PO Box MG-36, Magurele, Bucharest, Ramania
  3. Department of Microelectronics, Slovak University of Technoloy Ilkovicova 3, 812 19 Bratislava, Slovakia

Abstract

In this paper we report the results of Raman spectroscopy investigation on diamond like carbon (DLC) films obtained by Thermionic Vacuum Arc (TVA) deposition. The TVA technology is suitable for producing nanostructured materials because of the high power density of the vapor plasma generated by accelerated electron flux from the cathode and high energy of the ions incident on the depositing film, both these properties ensuring a high dispersion of the evaporated material. At condensation, the size of the generated structures is in the range of nanometers. From the Raman spectra we can notice that there were two peaks, one at 1379 cm-1 and the other at 1558,69 cm-1 which brought us to the conclusion that we have obtained DLC films (the spectra are typical for sp2 structure – D and G bands characteristic for such structure)..

Keywords

Raman spectra, Nanostructure, Diamond like carbon (DLC).

Submitted at: Jan. 18, 2006
Accepted at: March 23, 2006

Citation

G. MUSA, R. VLADOIU, V. CIUPINA, J. JANIK, Raman spectra of carbon thin films, Journal of Optoelectronics and Advanced Materials Vol. 8, Iss. 2, pp. 621-623 (2006)