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SELENIDE AND TELLURIDE THICK FILMS FOR MID AND THERMAL INFRARED APPLICATIONS

C. Vigreux-Bercovici1,* , L. Labadie2, J. E. Broquin3, P. Kern2, A. Pradel1

Affiliation

  1. Laboratoire de Physico-chimie de la Matière Condensée, Institut Gehrardt, UMR 5617, Université Montpellier II, Place Eugène Bataillon, 34095 Montpellier cedex 5, France
  2. Laboratoire d’Astrophysique de l’Observatoire de Grenoble, Observatoire de Grenoble, BP 53, 38041Grenoble cedex 9, France
  3. Institut de Microélectronique, Electromagnétisme et Photonique, ENSERG, 23 av. des Martyrs, BP 257, 38016 Grenoble cedex 1, France

Abstract

Planar waveguides based on selenide (As2Se3) or telluride (TeAs4Se5 or Te2As3Se5) glasses were elaborated and shown to work at 10.6 mm. The waveguides were obtained by deposition of thick films (up to 15 mm) on polished As2S3 glass substrate by thermal evaporation. The films were proved to be homogeneous, dense, adhesive to the chalcogenide substrate and transparent up to 18 micrometers. M-lines measurements at 10.6 mm highlighted the presence of several guided mode lines, proving that the manufactured structures behaved as waveguides and allowed us to measure the refractive index of the layers, i.e. 2.689 – 0.077, 2.719 – 0.003 and 2.821– 0.005 were measured for the As2Se3, TeAs4Se5, and Te2As3Se5 films, respectively..

Keywords

Selenide and telluride thick films, RF-Sputtering, Thermal evaporation, Optical Characterisation, m-lines measurements, Thermal infrared waveguides.

Submitted at: Aug. 25, 2005
Accepted at: Sept. 22, 2005

Citation

C. Vigreux-Bercovici, L. Labadie, J. E. Broquin, P. Kern, A. Pradel, SELENIDE AND TELLURIDE THICK FILMS FOR MID AND THERMAL INFRARED APPLICATIONS, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 5, pp. 2625-2632 (2005)