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SIO2 - LIKE THIN FILMS GENERATION IN CORONA DISCHARGES IN AIR AT ATMOSPHERIC PRESSURE: IR SPECTROSCOPY AND ATOMIC FORCE MICROSCOPY INVESTIGATIONS

A. Groza1, A. Surmeian1,* , M. Ganciu1, R. Medianu1, I. I. Popescu1

Affiliation

  1. Institute of Atomic Physics-INFLPR, P.O.Box MG 36, Bucharest 077125, Romania

Abstract

This paper demonstrates that the coupling between negative and positive corona discharges in air at atmospheric pressure can be used as a physical method for SiO2 thin films generation, having an organo-silicon compound (silicone oil) as precursor..

Keywords

Infrared spectroscopy, Corona discharge, Plasma applications.

Submitted at: July 4, 2005
Accepted at: July 21, 2005

Citation

A. Groza, A. Surmeian, M. Ganciu, R. Medianu, I. I. Popescu, SIO2 - LIKE THIN FILMS GENERATION IN CORONA DISCHARGES IN AIR AT ATMOSPHERIC PRESSURE: IR SPECTROSCOPY AND ATOMIC FORCE MICROSCOPY INVESTIGATIONS, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 4, pp. 2159-2164 (2005)