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SOME PHYSICAL PROPERTIES OF SPRAY DEPOSITED SnO2 THIN FILMS

E. Elangovan1,* , M. P. Singh2, M. S. Dharmaprakash3, K. Ramamurthi1

Affiliation

  1. Department of Physics, Bharathidasan University, Tiruchirappalli - 620 024, India
  2. Materials Research Centre, Indian Institute of Science, Bangalore - 560 012, India
  3. Department of Chemistry, B.M.S. College of Engineering, Bangalore - 560 019, India

Abstract

Thin films of tin oxide (SnO2) were deposited on various substrates by spray pyrolysis technique using SnCl2 as precursor. The as-prepared films were characterized for their electrical, optical and structural properties. Films deposited on optical glass showed the better electrical properties as compared to those deposited on other substrates. Further, fluorine- and antimony- doped SnO2 films were deposited on these substrates. The fluorine- doping resulted in enhancing both the electrical and optical properties of these films. On the other hand antimony- doping enhanced the electrical properties of the films but decreased the optical properties. The preferred orientation (211) of undoped films was found shifted to (200) for both the dopants. The change in orientation was reflected in SEM studies as they have different grain shapes. The minimum sheet resistance of 1.8 and 2.2 W/ obtained for the films SnO2:F and SnO2:Sb deposited on glass are the lowest among the reported values for these materials prepared from SnCl2 precursor. The 42 % transmittance of undoped films found increased to 85 % on fluorine- doping (15 wt. %) but decreased to 20 % on antimony- doping (2 wt. %)..

Keywords

Tin oxide thin films, Spray pyrolysis, SnCl2 precursor.

Submitted at: Aug. 25, 2003
Accepted at: March 15, 2004

Citation

E. Elangovan, M. P. Singh, M. S. Dharmaprakash, K. Ramamurthi, SOME PHYSICAL PROPERTIES OF SPRAY DEPOSITED SnO2 THIN FILMS, Journal of Optoelectronics and Advanced Materials Vol. 6, Iss. 1, pp. 197-203 (2004)