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SPECTROSCOPIC ANALYSIS OF A PULSED MAGNETRON DISCHARGE

P. Vašina1,2,* , M. Meško1, J. C. Imbert1, L. de Poucques1, L. Teule-Gay1, C. Boisse-Laporte1, J. Bretagne1, D. Pagnon1, M. Touzeau1, M. Ganciu1,3

Affiliation

  1. Laboratoire de Physique des Gaz et Plasmas, Université Paris-Sud, 91405 ORSAY Cedex France
  2. Department of Physical Electronic, Masaryk University, Brno, CZ-61137, Czech Republic
  3. National Institute of Laser, Plasma and Radiation Physics, MG 36, Magurele, Bucharest, Romania

Abstract

To investigate the generation and transport of ions during and after a high power current pulse applied on magnetron cathode, we performed spectroscopic measurements with time and space resolution. The microwave antennas placed between target and substrate ensure proper conditions of current pulse development, ion transport and, by re-exciting sputtered species, allows spectroscopic emission measurements of species transported towards the substrate. Measured data are presented and discussed..

Keywords

Pulsed magnetron, Spatially and time resolved plasma diagnostics, Transport processes.

Submitted at: Feb. 21, 2005
Accepted at: Sept. 22, 2005

Citation

P. Vašina, M. Meško, J. C. Imbert, L. de Poucques, L. Teule-Gay, C. Boisse-Laporte, J. Bretagne, D. Pagnon, M. Touzeau, M. Ganciu, SPECTROSCOPIC ANALYSIS OF A PULSED MAGNETRON DISCHARGE, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 5, pp. 2421-2425 (2005)