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STRUCTURAL, ELECTRICAL AND MAGNETIC PROPERTIES OF (FeNi)-Zr-Nb-N THIN FILMS

M. Urse1,* , A.- E. Moga1, M. Grigoras1

Affiliation

  1. National Institute of R & D for Technical Physics, 47 Mangeron Blvd., 700050 Iasi, Romania

Abstract

Nanocrystalline (FeNi)-Zr-Nb-N thin films consisting of a mixture of bcc and fcc phases and a small amount of amorphous phase were deposited in argon (Ar) and nitrogen (N2) atmosphere, in a sputtering system at room temperature. Some results concerning the effects of composition and thermal treatments on the structural, electrical and soft magnetic properties of (FeNi)-Zr-Nb-N thin films, in view of their utilization for manufacturing magnetic microdevices, which operate at high frequencies, are presented. Among the compositions of investigated thin films, (Fe85Ni15)82Zr2Nb4N12 samples exhibit excellent electrical and soft magnetic properties: good electrical resistivity r @ 125 mWcm, high saturation magnetization 4pMs @ 19 kGs, low coercivity Hc @ 2 Oe and near zero – magnetostriction. The good magnetic properties were due to the decrease of FeNi grain size by mixed effect of the intergranular amorphous phase as well as Zr and Nb – based precipitates..

Keywords

Thin films, Soft magnetic properties, Amorphous and nanocrystalline structure.

Submitted at: April 26, 2004
Accepted at: June 10, 2004

Citation

M. Urse, A.- E. Moga, M. Grigoras, STRUCTURAL, ELECTRICAL AND MAGNETIC PROPERTIES OF (FeNi)-Zr-Nb-N THIN FILMS, Journal of Optoelectronics and Advanced Materials Vol. 6, Iss. 2, pp. 629-632 (2004)