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The influence of oxygen flow on the tribological behaviour and residual stress of TiCO thin - films

D. MUNTEANU1,* , R. COZMA2, B. BORCEA1, F. VAZ2

Affiliation

  1. Dept. of Technological Equipment and Materials Science, Transilvania University, 29 Eroilor Blvd., 500036 Brasov, Romania
  2. Dept. of Product Design and Robotics, Transilvania University, 29 Eroilor Blvd., 500036 Brasov, Romania

Abstract

Within the frame of this work TiCO d.c. reactive magnetron sputtered films were prepared on (AISI M2) steel samples at 200oC. The depositions were carried out from a TiC solid target under the variation of two process parameters, such us time deposition and flow rate of reactive gas O2. The O2 flow varied between 0.5 and 7.5 sccm and the deposition time between 3600 and 6000 s. Static friction coefficient, wear and residual stresses are characterized and discussed as a function of both process parameters (oxygen flow and time). A compressive residual stress state has been observed if the O2 flow is bigger than 1 sccm. Generally, the addition of oxygen til 7.5 sccm leads to an increasing of this compressive stress level to -17.7 GPa. At the same time, for an oxygen flow rate higher than 2 sccm and a high compressive residual stress level, the deposited films presented good wear behaviour..

Keywords

Titanium, Oxycarbide, Sputtering, Friction, Residual stress, Wear.

Submitted at: Jan. 18, 2006
Accepted at: March 23, 2006

Citation

D. MUNTEANU, R. COZMA, B. BORCEA, F. VAZ, The influence of oxygen flow on the tribological behaviour and residual stress of TiCO thin - films, Journal of Optoelectronics and Advanced Materials Vol. 8, Iss. 2, pp. 712-715 (2006)