V. TIRON^1,* , C. VITELARU¹, M. SOLOMON¹, F. M. TUFESCU¹, G. POPA¹

Abstract

The paper presents the experimental results obtained in the study of transitory phenomena and hysteresis effect for a magnetron discharge in reactive-noble gas mixture, N2/Ar, with titanium target. The range of pressure was between 3 mTorr and 15 mTorr. The hysteresis effect is made evident in the current-voltage characteristic obtained by increasing, followed by decreasing, with constant rate, of discharge current and recording the voltage between cathode and anode. The transitory phenomena were studied both electrica ly and spectraly when the discharge current is switched as a step function between two constant values. As an electrical parameter was studied the voltage between cathode and anode, and as spectral parameter was measured intensity of folowing spectral lines: Ar+ (420,06 nm), Ti+ (503,7 nm) and N2 + (358,2 nm). These parameters have different temporal evolutions with the current discharge increasing as compared with the current discharge decreasing. This dissymmetry provides information about the rate of the processes occurring at the cathode during the formation of compounds on the surface, respectively, during the sputtering..

Keywords

Hysteresis, Magnetron discharge, Transitory phenomena.

Submitted at: Sept. 19, 2005
Accepted at: Jan. 26, 2006

Citation

V. TIRON, C. VITELARU, M. SOLOMON, F. M. TUFESCU, G. POPA, Transitory phenomena in pulsed reactive magnetron discharge, Journal of Optoelectronics and Advanced Materials Vol. 8, Iss. 1, pp. 66-70 (2006)

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