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TRIMORPH ACTUATION BASED ON SHAPE MEMORY ALLOYS

C. M. Craciunescu1, I. Mihalca2,* , V. Budau3

Affiliation

  1. Department of Materials Science and Heat Treatments, “Politehnica” University of Timisoara, 1900 Timisoara, Romania
  2. Department of Physics, “Politehnica” University of Timisoara, 1900 Timisoara, Romania and Reseach Institute of Condensed Materials, INCEMC, Timisoara, Romania
  3. Department of Materials Science and Heat Treatments, “Politehnica” University of Timisoara, 1900 Timisoara, Romania

Abstract

Trimorph and bimorph martensitic actuators have been designed and produced by sputter depositing NiTi shape memory alloys films on one or both sides of heated Si cantilever-type substrates. The phase transformation temperatures and specific sequence of the shape memory alloy films was induced by appropriately selecting the deposition temperature. Thus, the deflection of the trimorph cantilever recorded as a function of temperature reflects the phase transformation associated features of the corresponding films. Various actuation signals obtained by selecting the composition and the deposition temperatures of the films are discussed and models for the behavior of such trimorphs have been proposed..

Keywords

Shape memory alloys, Thin films, Actuation, NiTi.

Submitted at: Feb. 15, 2005
Accepted at: March 23, 2005

Citation

C. M. Craciunescu, I. Mihalca, V. Budau, TRIMORPH ACTUATION BASED ON SHAPE MEMORY ALLOYS, Journal of Optoelectronics and Advanced Materials Vol. 7, Iss. 2, pp. 1113-1120 (2005)