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A comparative study of (TiZr)C and (CuSiTiYZr)C films microstructure deposited by magnetron sputtering

G. I. ŞTEFĂNESCU1,* , I. CIUCĂ1, Ş. B. VASILE1

Affiliation

  1. Politehnica University of Bucharest, Romania

Abstract

Carbide coatings of (TiZr)C and (CuSiTiYZr)C on C45 substrates are prepared by magnetron reactive co-sputtering of Ti, Zr, Si, Ti, Y targets in an atmosphere of Ar+CH4. Thus obtained films are investigated for phase composition and morphology using XRD (X-Ray Diffraction), SEM (Scanning electron microscopy) and AFM (Atomic Force Microscopy). Primary investigations revealed that the (TiZr)C coating consist of a crystalline structure, mainly FCC, while the (CuSiTiYZr)C coating is mainly amorphous, several FCC crystallites embedded in the matrix are to be observed..

Keywords

Reactive sputtering, Microstructure, AFM, SEM, HRTEM, XRD.

Submitted at: Dec. 2, 2013
Accepted at: Jan. 22, 2014

Citation

G. I. ŞTEFĂNESCU, I. CIUCĂ, Ş. B. VASILE, A comparative study of (TiZr)C and (CuSiTiYZr)C films microstructure deposited by magnetron sputtering, Journal of Optoelectronics and Advanced Materials Vol. 16, Iss. 1-2, pp. 36-40 (2014)