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A new uncooled infrared detector based on 1D localized island porous silicon photonic crystal array

FENGJUAN MIAO1,2, BAIRUI TAO1,* , PENGFEI HUI1, LIYING ZOU1

Affiliation

  1. College of Communications and Electronics Engineering, Qiqihar University 42 Wenhua Street, Qiqihar Heilongjiang 161006, China
  2. National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

Abstract

A new uncooled infrared detector based on 1D localized island porous silicon photonic crystal was described. In this detector, the 1D porous silicon photonic crystal was fabricated by electrochemical etching technique to achieve the thermal isolation and better reflection for specific infrared at low cost serving as the substrate for uncooled infrared detector. Then a buffer layer of 5000 Å Si3N4 was deposited in order to improve the surface morphology of this photonic crystal to obtain a good IR absorber layer for pyroelectric application. The reflective spectrum of the 1D localized island porous silicon photonic crystals after deposited Si3N4 layer was measured by Fourier Transform Infrared Spectroscopy (FTIR). The result shown that deposited Si3N4 layer on the surface of localized photonic crystalline islands could not change the characteristics of photonic crystal. Subsequently, the sol-gel processing technology was adopted to deposit a thick BST thin film as the sensitivity layer. The detectivity dependence on the chopper frequency, at a bias voltage of 5 V, is 6.2×108 cm Hz1/2/W, higher than the substrate of Si and porous silicon at the same condition. It has demonstrated that the structure of 1D localized island porous silicon photonic crystal was a promising substrate material for uncooled infrared detectors..

Keywords

Localized island array, Uncooled, Detectivity.

Submitted at: March 29, 2011
Accepted at: Sept. 15, 2011

Citation

FENGJUAN MIAO, BAIRUI TAO, PENGFEI HUI, LIYING ZOU, A new uncooled infrared detector based on 1D localized island porous silicon photonic crystal array, Journal of Optoelectronics and Advanced Materials Vol. 13, Iss. 9, pp. 1114-1117 (2011)