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A review of processing dependences of microstructure and orientation of ferroelectric thin films

HE HAIYAN1,*

Affiliation

  1. College of Material Science and Engineering, Shaanxi University of Science and Technology, 710021, China

Abstract

The ferroelectric thin film was widely investigated in detail in recent years. The ferroelectric properties of the thin films are obviously dependent on the microstructure of the film, which were influenced by some processing parameters for preparing the films, including precursor solution chemistry, nature of substrate, film thickness, and condition of heat treatment etc. In this paper, these pcocessing dependences of the films were reviewed..

Keywords

Thin film, Ferroelectricity, Processing effect, microstructure, orientation.

Submitted at: Jan. 11, 2008
Accepted at: Feb. 24, 2009

Citation

HE HAIYAN, A review of processing dependences of microstructure and orientation of ferroelectric thin films, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 2, pp. 140-145 (2009)