Cookies ussage consent
Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our site without changing the browser settings you grant us permission to store that information on your device.I agree, do not show this message again.
C. KAVITHA1,* , M. GANESH MADHAN1
- Department of Electronics Engineering,Madras Institute of Technology, Anna University Chennai, India
A simplified equivalent circuit for the analysis of squeezed film effects in a capacitive MEMS accelerometer is reported in this paper. The reduction of the equivalent circuit is realized by identifying the minimum impedance of the parallel network representing the squeezed film model. The transient and frequency response analysis are carried out in the temperature range of 100K to 400 K, at the pressures of 30Pa, 300Pa and 3000Pa. The results are compared with the experimental and theoretical values reported in literature and the deviations are found to be low as 6% in transient response and less than 5% in the frequency response. It is found that the result of the simplified model agrees well with the detailed model. Due to th e circuit reduction, a significant reduction in complexity and computation time is observed..
squeezed film damping, Equivalent circuit, MEMS, Capacitive accelerometer, Modeling, Impedance, Dynamic simulation.
Submitted at: Aug. 28, 2015
Accepted at: Nov. 28, 2017
C. KAVITHA, M. GANESH MADHAN, A simplified equivalent circuit model for the study of squeezed film effects in a capacitive MEMS accelerometer, Journal of Optoelectronics and Advanced Materials Vol. 19, Iss. 11-12, pp. 719-728 (2017)
- Download Fulltext
- Downloads: 206 (from 132 distinct Internet Addresses ).