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A study of the morphology of thin films by surface acoustic wave pulses♣

L. L. KONSTANTINOV1,*

Affiliation

  1. Central Laboratory of Mineralogy and Crystallography, Bulgarian Academy of Sciences, Acad. G. Bonchev Street, Bl. 107, 1113 Sofia, Bulgaria

Abstract

Changes arising in the dispersion and attenuation of short surface acoustic wave (SAW) pulses, caused by material elastic and density imperfections and discontinuities, are discussed from the viewpoint of using them for inspecting the morphology and homogeneity of thin amorphous films. For this purpose, one can relate variations in the frequency dependence of the SAW phase velocity and attenuation coefficient with parameters describing the surface roughness profile. The approach is demonstrated via an example of the determination of the morphology of a thin film of a-Si:H deposited by laser-induced chemical vapour deposition (LICVD) on a c-Si substrate..

Keywords

Surface acoustic waves (SAW), SAW dispersion and attenuation, Thin amorphous films.

Submitted at: Nov. 5, 2008
Accepted at: Sept. 9, 2009

Citation

L. L. KONSTANTINOV, A study of the morphology of thin films by surface acoustic wave pulses♣, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 9, pp. 1281-1283 (2009)