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Al doped ZnO thick films as CO2 gas sensors

ARUN PATIL1,* , CHANDRAKANT DIGHAVKAR1, RATAN BORSE2

Affiliation

  1. L.V.H. College, Panchavati, Nashik 422003, Maharashtra, India.
  2. Thin and Thick film Laboratory, Dept. of Electronics, M.S.G.College, Malegaon Camp 423105, Dist. Nashik, Maharashtra, India

Abstract

Thick films of pure and Al doped ZnO with various concentrations (1 wt. %, 3 wt. %, 5 wt. %, 7 wt. % and 10 wt. %) of Al were prepared on alumina substrates using a screen printing technique. These films were fired at a temperature of 700ºC for two hours in an air atmosphere. Morphological, compositional and structural properties of the samples were studied using the scanning electron microscopy (SEM), Energy dispersive spectroscopy (EDAX) and X-ray diffraction techniques respectively. The gas sensing studies were carried out in a static gas sensing system under normal laboratory conditions. The surface resistance of thick films changes when exposed to CO2 gas. The Al doped films show significant sensitivity to CO2 gas than pure ZnO film. 10 wt. % Al-doped ZnO films were found to be more sensitive to CO2 gas exposed at 250o C than other doping concentrations with fast response and comparatively slow recovery time..

Keywords

ZnO, Al, Thick films, Screen printing, CO2.

Submitted at: Aug. 17, 2011
Accepted at: Oct. 20, 2011

Citation

ARUN PATIL, CHANDRAKANT DIGHAVKAR, RATAN BORSE, Al doped ZnO thick films as CO2 gas sensors, Journal of Optoelectronics and Advanced Materials Vol. 13, Iss. 10, pp. 1331-1337 (2011)