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Aluminum oxide sandwiched microstructure for four-output under normal incidence

ZHICHAO XIONG1, BO WANG1,* , YUSEN HUANG1, XIAOQING ZHU1, XIAOFENG WANG1, HONG ZOU1, JINHAI HUANG1, WEIYI YU1, JIAHAO LI1, GUODING CHEN1

Affiliation

  1. School of Physics and Optoelectronic Engineering, Guangdong University of Technology, Guangzhou 510006, China

Abstract

In this paper, a high-efficiency transmission four-port beam splitter grating with the incident wavelength of 800 nm under normal incidence is proposed. This grating has the characteristic of zeroth order elimination. The total diffraction efficiency of this grating achieved 89.16% and 93.40% for TE and TM polarizations respectively. Meanwhile, the beam splitter uniformity is better than 10%. We used rigorous coupled-wave analysis and the simulated annealing algorithm to calculate and optimize the parameters of the beam splitter. The fabrication tolerance of the grating is analyzed and discussed..

Keywords

Four-port, Beam splitter, Transmission grating, Normal incidence.

Submitted at: Jan. 14, 2022
Accepted at: Dec. 6, 2022

Citation

ZHICHAO XIONG, BO WANG, YUSEN HUANG, XIAOQING ZHU, XIAOFENG WANG, HONG ZOU, JINHAI HUANG, WEIYI YU, JIAHAO LI, GUODING CHEN, Aluminum oxide sandwiched microstructure for four-output under normal incidence, Journal of Optoelectronics and Advanced Materials Vol. 24, Iss. 11-12, pp. 516-522 (2022)