"

Cookies ussage consent

Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our site without changing the browser settings you grant us permission to store that information on your device.

I agree, do not show this message again.

Anodic arc evaporation of nanocrystalline Mg films

O. FILIPOV1, S. SCHIPPOREIT1, V. BUCK1,*

Affiliation

  1. University of Duisburg-Essen and CENIDE, Department of Physics, Thin Film Technology, Lotharstraße 1, Duisburg D-47057, Germany

Abstract

This work aims at analysing the influence of bias voltage and hydrogen admixture on Mg grain size. The grain size was varied down to 18 nm. Also, using Monte Carlo simulations, it was shown that arc deposition is less aggressive against sensitive polymers than sputter deposition due to ion energies. The manipulation of magnesium grain size by variation of bias voltage and thus ion energies, and the influence of an admixture of hydrogen into the plasma was investigated using retarding field analysis and XRD. Possible applications for hydrogen storage are discussed..

Keywords

Anodic arc, Arc evaporation, Ion energies, Mg, grain size, Hydrogen storage.

Submitted at: Oct. 4, 2011
Accepted at: April 11, 2012

Citation

O. FILIPOV, S. SCHIPPOREIT, V. BUCK, Anodic arc evaporation of nanocrystalline Mg films, Journal of Optoelectronics and Advanced Materials Vol. 14, Iss. 3-4, pp. 418-424 (2012)