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Combination of laser-based micro-processing and microanalysis by means of a lensed optical fiber

S. YAKUNIN1, T. STEHRER1, J. D. PEDARNIG1, J. HEITZ1,*

Affiliation

  1. Institute of Applied Physics and Christian Doppler Laboratory for Laser-Assisted Diagnostics, Johannes Kepler University Linz, A-4040 Linz, Austria

Abstract

We describe a scanning optical near-field microscopic (SNOM) setup allowing to produce micro-patterns by ablation, to perform laser-induced breakdown spectroscopy (LIBS), and atomic force microscope (AFM) investigation with the same optical fiber tip. The use of lensed fibers combines the advantages of high numerical aperture optics with high transmission for ns laser pulses. This allows to ignite a plasma for LIBS spectra at a certain distance between sample surface and fiber tip for increased tip durability. The tip is characterized by deconvolution from AFM measurements or by a scanned pinhole for measurement of the near- and far-field light intensity distribution..

Keywords

SNOM, AFM, LIBS, Lensed fiber tips, Near-field light intensity distribution.

Submitted at: June 20, 2009
Accepted at: Feb. 27, 2010

Citation

S. YAKUNIN, T. STEHRER, J. D. PEDARNIG, J. HEITZ, Combination of laser-based micro-processing and microanalysis by means of a lensed optical fiber, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 3, pp. 758-761 (2010)