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Comparative study on standard geometrical structures of cantilever-based MEMS piezoelectric energy harvester over T-shaped cantilever beam for low frequency ambient vibrations

SALEM SAADON1,2,* , OTHMAN SIDEK2

Affiliation

  1. School of Electrical and Electronic Engineering, Universiti Sains Malaysia (USM),14300 NibongTebal, Pulau Pinang, Malaysia
  2. Collaborative Microelectronic Design Excellence Center (CEDEC),Universiti Sains Malaysia(USM), Engineering Campus 14300 Nibong Tebal, Seberang Perai Selatan, Pulau Pinang, Malaysia

Abstract

The micro-generators can become an alternative to the battery-based solutions in the future, especially for remote systems. In this paper, we proposed a model and presented the simulation of a MEMS-based energy harvester of three different shapes piezoelectric cantilevers under ambient vibration excitation using the COVENTORWARE2010 approach. The designed T-shaped cantilever-based MEMS energy harvester that operates under ambient excitation frequency of 11 Hz within a base acceleration of 1g produces an output power of 2.4 μw at 5kΩ load..

Keywords

Piezoelectric materials, Piezoelectricity, Shaped cantilever, MEMS.

Submitted at: July 30, 2013
Accepted at: May 15, 2014

Citation

SALEM SAADON, OTHMAN SIDEK, Comparative study on standard geometrical structures of cantilever-based MEMS piezoelectric energy harvester over T-shaped cantilever beam for low frequency ambient vibrations, Journal of Optoelectronics and Advanced Materials Vol. 16, Iss. 5-6, pp. 612-618 (2014)