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Construction of periodic micro-/nanostructures by glancing angle deposition

L. X. HU1, P. WANG1, X. Y. WAN1, S. H. CHEN1, S. J. JIANG1,*

Affiliation

  1. State Key Laboratory of Optoelectronic Materials and Technologies,Sun Yat-sen University, Guangzhou 510275, China

Abstract

Sculptured thin films (STFs) are a kind of anisotropic thin films with micro-nano structures prepared by glancing angle deposition (GLAD) technique. They exhibit novel optical functional properties. The periodic pre-defined seed layers (PDSLs) introduced to the GLAD process can act as a ‘foundation footings’ to define the upper structures. In this paper, the relations between structure parameters of PDSLs and experimental deposition parameters are summarized. PDSLs prepared by three different methods are used as substrates for STFs deposition, so that the porous and structure characteristics of STFs can be controlled in three-dimensions and then an effective way for fabricating functional micro/nano devices can be provided..

Keywords

Sculpture thin films (STFs), Glancing angle deposition (GLAD), Periodic, Pre-defined seed layers (PDSLs).

Submitted at: Jan. 6, 2011
Accepted at: June 9, 2011

Citation

L. X. HU, P. WANG, X. Y. WAN, S. H. CHEN, S. J. JIANG, Construction of periodic micro-/nanostructures by glancing angle deposition, Journal of Optoelectronics and Advanced Materials Vol. 13, Iss. 6, pp. 697-701 (2011)