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Correlation between the UV-reflectance spectra and the structure of poly-Si films obtained by Aluminium Induced Crystallization♣

D. DIMOVA-MALINOVSKA1,* , O. ANGELOV1, M. SENDOVA-VASSILEVA1, V. MIKLI2

Affiliation

  1. Central Laboratory for Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee Blvd., 1784 Sofia, Bulgaria
  2. Centre for Materials Research, Tallinn Technical University, Tallinn, Estonia

Abstract

The structural properties of poly-Si films prepared by the method of Aluminium Induced Crystallization (AIC) of amorphous Si films (a-Si:H) deposited on glass substrates covered with Al layers were studied. Raman and XRD (X-Ray Diffraction) spectroscopy were used for characterization of their short and long range order, respectively. The UV (Ultra-Violet) reflectance spectra of poly-Si films were measured, as well. The surface morphology was revealed by optical microscopy. The dependence of the structural and optical properties of the obtained poly-Si films on the hydrogen pressure during the deposition of the a-Si:H precursor was studied. A correlation between the short and long range ordering in poly-Si films, their surface morphology and the UV optical reflectance spectra was identified. Poly-Si films with better structural properties are obtained by AIC, using a-Si:H precursor layers with moderate concentrations of hydrogen..

Keywords

Poly-Si thin films, UV reflectance, Raman spectroscopy.

Submitted at: Nov. 5, 2008
Accepted at: Sept. 9, 2009

Citation

D. DIMOVA-MALINOVSKA, O. ANGELOV, M. SENDOVA-VASSILEVA, V. MIKLI, Correlation between the UV-reflectance spectra and the structure of poly-Si films obtained by Aluminium Induced Crystallization♣, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 9, pp. 1079-1085 (2009)