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Deposition of carbon structures at atmospheric pressure by plasma jet

L. MARCINAUSKAS1,2,* , A. GRIGONIS1, P. VALATKEVIČIUS2

Affiliation

  1. Department of Physics, Kaunas University of Technology, Studentu 50, LT-51368 Kaunas, Lithuania,
  2. Lithuanian Energy Institute, Plasma Processing Laboratory, Breslaujos 3, LT-44403 Kaunas, Lithuania

Abstract

The carbon coatings were prepared on the steel substrates from Ar/C2H2 gas mixture at atmospheric pressure by plasma jet technique. The Ar/C2H2 gas volume ratio was 100, 150, and 200, while the distance between plasma torch nozzle exit and the samples was 0.005÷0.02 m. Scanning electron microscopy analysis demonstrated that the surface roughness and growth rate of the coatings increases with the Ar/C2H2 ratio. RBS and ERD results showed that the hydrogen and oxygen concentrations in the coatings decrease with the decrease of the deposition distance. Raman spectroscopy indicated that the film prepared at 0.005 m has the highest sp3 C-C fraction, while the coating prepared at 0.02 m has the highest fraction of sp3 CHx bonds..

Keywords

plasma jet, acetylene, atmospheric pressure, carbon structures.

Submitted at: April 7, 2010
Accepted at: April 26, 2010

Citation

L. MARCINAUSKAS, A. GRIGONIS, P. VALATKEVIČIUS, Deposition of carbon structures at atmospheric pressure by plasma jet, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 4, pp. 829-833 (2010)