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Effect of annealing temperature on surface roughness of BaTiO3 thin films deposited by vacuum evaporation method



  1. Department of Physics, Kumaraguru College of Technology, Coimbatore – 641 049, Tamil Nadu, India
  2. Departments of Physics, Kongunadu Arts and Science College, G.N- Mills, Coimbatore – 641029, Tamil Nadu, India


The deposition of Barium titanate (BaTiO3) thin films was performed on glass substrates that were thoroughly cleaned. The process was carried out under a pressure of 10-5 torr using a 12A4 Hind Hivac coating unit. The thickness of the deposited films was measured using a quartz crystal thickness monitor, which allowed for precise thickness determination. X-ray diffractometry was utilized to examine and analyze the structural properties of the films. The obtained X-ray patterns indicated that the crystallinity of the films improved as the annealing temperature increased. This suggests that higher annealing temperatures promoted the formation of well-defined crystal structures within the BaTiO3 thin films. The surface roughness of the films was assessed using Speckle photography, a technique that provides insights into the roughness characteristics of a surface. The results revealed that the roughness of the films decreased as the annealing temperature was raised. This implies that higher annealing temperatures led to smoother surfaces for the BaTiO3 thin films..


BaTiO3, XRD, Roughness.

Submitted at: July 25, 2023
Accepted at: April 10, 2024


R. SENGODAN, R. BALAMURUGAN, S. NITHYA, B. CHANDRA SHEKAR, Effect of annealing temperature on surface roughness of BaTiO3 thin films deposited by vacuum evaporation method, Journal of Optoelectronics and Advanced Materials Vol. 26, Iss. 3-4, pp. 149-160 (2024)