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Effect of substrate crystal type on properties of oblique angle sputtered barium strontium titanate (Ba0.5Sr0.5TiO3) thin films



  1. Materials and Energy Research Center, Karaj, Iran


The substrate type effect on properties of oblique angle sputter deposited Barium strontium titanate films have been investigated. The thickness of the layers decreased with increasing deposition angle. The dependence of optical properties of deposited films on substrate types was studied using reflectometry. The electrical properties of films also were characterized by I-V measurement in an appropriate range. It has been found that the effective refractive index of deposited films was changed due to the variation in surface morphology which caused a redshift in the peak position of the reflectance spectrum. The substrate material and the deposition angle affected the grain size of the synthesized layers, which results in variation in the porosity of deposited layers. Improvements in electrical conductivity were observed in the coated samples on polycrystalline and amorphous substrates. Deposition on glass substrate results in increased grain size and decreased electrical resistance with respect to alumina substrate. Increasing the deposition angle also increased the grain size..


Barium strontium titanate, Substrate effect, Oblique angle deposition, Reflectometry, Grain size, Surface porosity.

Submitted at: Feb. 21, 2022
Accepted at: Oct. 6, 2023


MOHAMAD JAVAD ESHRAGHI, MAHDI BORDBARI, NIMA NADERI, ALI SEDAGHAT AHANGARI HOSSEINZADEH, Effect of substrate crystal type on properties of oblique angle sputtered barium strontium titanate (Ba0.5Sr0.5TiO3) thin films, Journal of Optoelectronics and Advanced Materials Vol. 25, Iss. 9-10, pp. 494-507 (2023)