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Electrical and structural characterization of carbon based films prepared by RF-PECVD and ECR-PECVD techniques for photovoltaic applications

M. PERNÝ1,* , J. HURAN2, V. ŠÁLY1, M. VÁRY1, J. PACKA1, A. P. KOBZEV3

Affiliation

  1. Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Ilkovičova 3, 81219 Bratislava, Slovakia
  2. Institute of Electrical Engineering, Slovak Academy of Sciences, Dúbravská cesta 9, 84104 Bratislava, Slovakia
  3. Joint Institute for Nuclear Research, Joliot-Curie 6, 141980 Dubna, Moscow Region, Russian Federation

Abstract

Carbon based materials, such as amorphous carbon (a-C) and hydrogenated amorphous carbon (a-C:H) as well as diamond like carbon (DLC) with predomination of sp3 bonds are widely used in electronics and machinery. Among other advantages of these materials, environmental friendly method of preparation is important. In the field of photovoltaics (PV) they can be used as antireflective coating or as emitter layer in amorphous carbon/crystalline silicon (a-C/c-Si) heterojunction for low cost solar cell structure. Diamond-like carbon film was deposited on p-type Si (100) substrates at various deposition conditions by means of Radio Frequency Plasma-Enhanced Chemical Vapor Deposition (RF-PECVD) and Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition (ECR-PECVD) techniques. The concentration of chemical elements in films was determined by both, Rutherford backscattering spectrometry (RBS) and elastic recoil detection (ERD) analytical method. RBS and ERD analysis indicate that the films contain carbon, hydrogen and a small amount of oxygen. The current transport mechanisms in prepared samples were investigated using analysis of current-voltage (I-V) and capacitance-voltage (C-V) measurements..

Keywords

Diamond-like carbon film, Plasma, CVD, Electrical properties, Current transport mechanism, Heterostructure, Solar cells.

Submitted at: Dec. 18, 2012
Accepted at: March 13, 2014

Citation

M. PERNÝ, J. HURAN, V. ŠÁLY, M. VÁRY, J. PACKA, A. P. KOBZEV, Electrical and structural characterization of carbon based films prepared by RF-PECVD and ECR-PECVD techniques for photovoltaic applications, Journal of Optoelectronics and Advanced Materials Vol. 16, Iss. 3-4, pp. 306-310 (2014)