"

Cookies ussage consent

Our site saves small pieces of text information (cookies) on your device in order to deliver better content and for statistical purposes. You can disable the usage of cookies by changing the settings of your browser. By browsing our site without changing the browser settings you grant us permission to store that information on your device.

I agree, do not show this message again.

Femtosecond laser texturization for improvement of photovoltaic cells: Black Silicon

R. TORRES1,* , V. VERVISCH1, M. HALBWAX2, T. SARNET1, P. DELAPORTE1, M. SENTIS1, J. FERREIRA3, D. BARAKEL3, S. BASTIDE4, F. TORREGROSA5, H. ETIENNE5, L. ROUX5

Affiliation

  1. LP3 (Laser, Plasmas and Photonic Processes) CNRS UMR 6182 Luminy, Case 917, 13009 Marseille, France
  2. IEMN (Institute of Electronics, Microelectronics and Nanotechnology) CNRS UMR 8520, Av Poincaré, 59652 Villeneuve d’Ascq cedex, France
  3. IM2NP (Institut Matériaux Microélectronique Nanosciences de Provence) CNRS UMR 6122, Av. Esc. Normandie Niemen, 13397 Marseille CEDEX 20, France
  4. ICMPE (East Paris Institute of Chemistry and Material Science) CNRS UMR 7182, rue H. Dunant F-94320 Thiais, France
  5. IBS (Ion Beam Services) ZI Peynier Rousset - Rue Gaston Imbert Prolongée - 13790 Peynier, France

Abstract

We have irradiated silicon with a series of femtosecond laser pulses to improve light absorption of photovoltaic solar cells. The black silicon shows excellent optical properties on mono and multicrystalline silicon wafers with a reflectivity down to 3 %, without crystal orientation dependence. After the laser process, the front side of samples have been boron-implanted by Plasma Immersion Ion Implantation to create the 3D p+ junction. Improved electrical performances have also been demonstrated with a 57 % increase in the photocurrent, compared to the non-texturized surface..

Keywords

Black silicon, Photovoltaic, Femtosecond laser, Texturization, Solar cells.

Submitted at: June 30, 2009
Accepted at: Feb. 27, 2010

Citation

R. TORRES, V. VERVISCH, M. HALBWAX, T. SARNET, P. DELAPORTE, M. SENTIS, J. FERREIRA, D. BARAKEL, S. BASTIDE, F. TORREGROSA, H. ETIENNE, L. ROUX, Femtosecond laser texturization for improvement of photovoltaic cells: Black Silicon, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 3, pp. 621-625 (2010)