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MUHAMMAD AMMAR KHAN1,2,* , JINGFU BAO2, M. UMAR FAROOQ3
- Department of Physical and Numerical Sciences, Qurtuba University of Science and Information Technology, D. I. Khan, Pakistan
- School of Electronic Science and Engineering, University of Electronic Science and Technology of China, 611731, P. R. China
- School of Physics, University of Electronic Science and Technology of China, 610054, P. R. China
This paper presents an approach to reduce anchor loss in high frequency micro-electromechanical system (MEMS) resonator by using phononic crystal. The novel designed phononic crystal with supporting tethers is to see the formation of very wide and complete band gaps in desired frequency range from 65-252MHz and 305-388MHz, and improvement of quality factor from 13671 (without framing holes stub) to 51281 (with framing holes stub) by introducing a small putlog holes with unique frame stub with tethers width TW =8 m, and length TL =0.5. We show that size of stub and holes can help to improve the formation of wide band-gaps, and Quality factor. This proposed PnC MEMS resonator can effectively decrease the anchor loss. The aim of this paper is to present a novel framing holes Phononic crystal configuration for applications in silicon-based MEMS resonators..
Phononic crystal, MEMS resonator, Bandgap, Anchor loss, High quality factor.
Submitted at: Nov. 7, 2018
Accepted at: Oct. 7, 2021
MUHAMMAD AMMAR KHAN, JINGFU BAO, M. UMAR FAROOQ, Framing holes phononic crystal structure for Q-factor enhancement of thin-film-piezoelectric-on-silicon MEMS resonator, Journal of Optoelectronics and Advanced Materials Vol. 23, Iss. 9-10, pp. 472-476 (2021)
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