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Generation of Ce and W doped titanium oxide thin films by pulsed excimer laser irradiation

YASIR F. JOYA1,* , ZHU LIU1

Affiliation

  1. Corrosion & Protection Centre, The Mill, School of Materials, The University of Manchester, Manchester, M60 1QD, United Kingdom

Abstract

Mesoporous (pore size<50 nm) anatase and rutile based films were generated in WO3 doped TiO2 films by excimer laser induced transformation. CeO2 (5 wt.%) and WO3 (3 wt.%) doped TiO2 precursor films were prepared by a sol-gel method and spin-coated on Pt(Si) substrate. KrF (248 nm, 13 ns) pulsed excimer laser beam with variation in fluence and number of pulses, was applied on film surface. The effect of laser operating conditions on TiO2 crystallization, microstructure and morphology was studied by Raman spectroscopy, FEG-SEM and AFM respectively. Anatase was revealed at laser fluence of 35mJ/cm2 in both TiO2 compositions. Ce doped film was crystallized to anatase under higher number of laser pulses in contrast to W doped TiO2. Whereas, finer features and surface morphology was obtained in the later..

Keywords

Pulsed excimer laser, Sol-gel, Anatase, Raman Spectroscopy, Laser Induced Phase transformation, FEG-SEM.

Submitted at: June 30, 2009
Accepted at: Feb. 27, 2010

Citation

YASIR F. JOYA, ZHU LIU, Generation of Ce and W doped titanium oxide thin films by pulsed excimer laser irradiation, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 3, pp. 589-594 (2010)