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Growth dynamics of pulsed-laser-deposited AlN films♣

S. BAKALOVA1,* , A. SZEKERES1,2, G. HUHN2, K. HAVANCSAK2, S. GRIGORESCU3, G. SOCOL3, E. AXENTE3, I. N. MIHAILESCU3, R. GAVRILA4

Affiliation

  1. Institute of Solid State Physics, Bulgarian Academy of Sciences, Tzarigradsko Ch. 72, Sofia 1784, Bulgaria
  2. Eotvos Lorand University, Faculty of Solid State Physics, 1 Pazmany Peter setany, 1117 Budapest, Hungary
  3. Lasers Department, National Institute for Lasers, Plasma and Radiation Physics, PO Box MG-54, RO-77125, Bucharest-Magurele, Romania
  4. National Institute for R&D in Microtechnologies, 32B Erou Iancu Nicolae, RO-72296, Bucharest, Romania

Abstract

Films of AlN with different thicknesses are synthesized by pulsed laser deposition in a nitrogen gas ambient. The study of the structure and surface morphology is focused on the different mechanisms governing the film growth. Film crystalline properties, growth rate, lattice mismatch induces strain and strain relaxation process is considered. The films start growing in a 2D mode, resulting in a smooth surface and a predominantly amorphous structure with a small amount of crystalline AlN. The change in the surface energy with the number of laser pulses applied is the reason for the formation of a 3D structure and 3D island growth at the later stages, resulting in a rough surface and a dense polycrystalline film structure with a cubic phase. These conclusions conform to results from structural and optical analyses..

Keywords

Aluminium nitride, Pulsed laser deposition, Surface morphology, Growth mechanism.

Submitted at: Nov. 5, 2008
Accepted at: Oct. 3, 2009

Citation

S. BAKALOVA, A. SZEKERES, G. HUHN, K. HAVANCSAK, S. GRIGORESCU, G. SOCOL, E. AXENTE, I. N. MIHAILESCU, R. GAVRILA, Growth dynamics of pulsed-laser-deposited AlN films♣, Journal of Optoelectronics and Advanced Materials Vol. 11, Iss. 10, pp. 1479-1482 (2009)