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High density optical recording in thin chalcogenide films

A. A. KRYUCHYN1, V. V. PETROV1,* , S. O. KOSTYUKEVYCH2

Affiliation

  1. Institute for Information Recording of NAS of Ukraine, 2 Shpak Str., 03113, Kyiv, Ukraine
  2. V. Ye. Lashkaryov Institute of Semiconductor Physics of NAS of Ukraine, 41 Prospect Nauky, 03028, Kiev, Ukraine

Abstract

Presented in this work are the results of investigations aimed at recording information with focused laser radiation in thin films of chalcogenide vitreous semiconductors (ChVS). Over all the stages in creation of systems for optical recording, there widely used were thin films of ChVS. The first optical disc carriers were designed using thermo-sensitive materials based on tellurium alloys. Shown is perspective to use thin ChVS films for creation of optical carriers for long-term information storage. The high density of recorded information in them is achieved when using the thermo-lithographic methods. Nonorganic photoresists based on ChVS can be also efficiently used for manufacturing master discs. Obtaining the needed minimal sizes of pits in master discs (used in manufacturing compact-discs) is promoted by a non-linear dependence of the exposure characteristics on the intensity of exposing radiation. When using non-organic resists of the As-S, As-S-Se systems, there obtained are pits of 0.25 – 0.3 μm width. Information was recorded using the focusing objective with the numeric aperture 0.85 and radiation from a semiconductor laser with the wavelength 405 nm. The metal adhesive layer deposited on the glass substrate strongly influences on the recording process. We chose the recording regime in such a manner that enabled us to prevent local photo-thermal destruction of resist in the center of irradiated area. Presented in the work are the results of studying optical recording in thin ChVS films prepared recently in labs of Institute for Information Recording and V. Lashkaryov Institute of Semiconductor Physics, NAS of Ukraine. One of the obtained results is technology for manufacturing stamps for copying CD based on non-organic photoresists..

Keywords

Thin chalcogenide films, Optical recording, Thermolithography.

Submitted at: June 22, 2011
Accepted at: Nov. 23, 2011

Citation

A. A. KRYUCHYN, V. V. PETROV, S. O. KOSTYUKEVYCH, High density optical recording in thin chalcogenide films, Journal of Optoelectronics and Advanced Materials Vol. 13, Iss. 11-12, pp. 1487-1492 (2011)