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Hybrid microwave-plasma hot-wall reactor for synthesis of silica nanoparticles under well-controlled conditions

A. ABDALI1,* , B. MORITZ1, A. GUPTA1, H. WIGGERS1,2, C. SCHULZ1,2

Affiliation

  1. IVG, University of Duisburg-Essen, Duisburg, Germany
  2. CeNIDE, Center for NanoIntegration Duisburg-Essen

Abstract

A microwave-plasma reactor was constructed for gas-phase synthesis of silica nanoparticles from tetraethoxysilane and a subsequent hot-wall furnace was used to enable for different temperature/time profiles. This combination has enabled us to investigate the growth of silica particles in detail. Particle properties such as size, size distribution, shape, morphology, and agglomeration were investigated via transmission electron microscopy (TEM). The samples were collected on TEM grids insitu from the reactor and ex-situ from a filter device. The particles collected directly from the gas flow are non-agglomerated and have a spherical morphology. However, those obtained from the filter are spherical in shape but have a high degree of agglomeration..

Keywords

TEOS, Silica, Nanoparticles, Synthesis, Plasma.

Submitted at: June 22, 2009
Accepted at: Feb. 27, 2010

Citation

A. ABDALI, B. MORITZ, A. GUPTA, H. WIGGERS, C. SCHULZ, Hybrid microwave-plasma hot-wall reactor for synthesis of silica nanoparticles under well-controlled conditions, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 3, pp. 440-444 (2010)