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Influence of film thickness and optical constants on femtosecond laser-induced ablation of hydrogenated amorphous carbon films

R. KOTER1, M. WEISE1, A. HERTWIG1, U. BECK1, J. KRÜGER1,*

Affiliation

  1. BAM Federal Institute for Materials Research and Testing, Division VI.4, Unter den Eichen 87, 12205 Berlin, Germany

Abstract

Hydrogenated amorphous carbon layers were deposited on BK7 glass in a plasma-assisted chemical vapor deposition process. Low and high refracting films with thicknesses d ranging from 11 nm to 5.8 µm were produced having refractive indices n between 1.68 and 2.41 and linear absorption coefficients of 100 cm-1 and 20000 cm-1 at 800 nm wavelength as a result of different plasma modes. Laser ablation thresholds Fth in dependence on d were determined using 30-fs laser pulses. Low absorbing layers show a constant Fth while Fth increases with rising d up to the optical penetration depth of light  -1 for high absorbing films..

Keywords

Physical radiation damage (61.80.-x), Laser-beam impact phenomena (79.20.Ds), Radiation treatment (81.40.Wx), Carbon (81.05.Uw), Optical constants (78.20.Ci).

Submitted at: June 18, 2009
Accepted at: Feb. 27, 2010

Citation

R. KOTER, M. WEISE, A. HERTWIG, U. BECK, J. KRÜGER, Influence of film thickness and optical constants on femtosecond laser-induced ablation of hydrogenated amorphous carbon films, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 3, pp. 663-667 (2010)