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Influence of geometry and material properties on resonant frequencies and sensitivity of MEMS cantilever-type structures

G. IONAŞCU1,* , A. SANDU2, E. MANEA3, R. GAVRILA3, C. D. COMEAGA1, L. BOGATU1, D. BESNEA1

Affiliation

  1. Mechatronics and Precision Mechanics Department, "Politehnica" University of Bucharest, Romania
  2. Department of Strength of Materials, "Politehnica" University of Bucharest, Romania
  3. National Institute for Research & Development in Microtechnology of Bucharest, Romania

Abstract

The paper presents the analysis and simulation of three shapes of cantilevers – rectangular, triangular and trapezoidal with a rectangle tip (the two last ones of inner cut form), micromachined through Micro-Electro-Mechanical Systems (MEMS) technology. The vibration modes and the resonant (natural) frequencies were determined by Finite Element Method (FEM), and measured using Laser-Doppler Vibrometry (LDV) by scanning with the Polytec MSA–500 system, and also by Atomic Force Microscopy (AFM). Based on validated models of numerical computation, the sensitivity has been predicted for a chemical detection application. The influence of structural geometry (shape and sizes, measured by Scanning Electron Microscopy – SEM) and material properties (silicon Young’s modulus, estimated with analytical expressions for the simplest shape cantilever – the rectangular one, and measured by nanoindentation) have been pointed out with respect to the dynamic behavior (analyzed from the perspective of resonant frequencies) and sensitivity of the analyzed MEMS structures..

Keywords

MEMS cantilever, Resonant frequency, Young’s modulus, FEM, LDV, AFM, SEM, Nanoindentation.

Submitted at: Nov. 14, 2013
Accepted at: May 15, 2014

Citation

G. IONAŞCU, A. SANDU, E. MANEA, R. GAVRILA, C. D. COMEAGA, L. BOGATU, D. BESNEA, Influence of geometry and material properties on resonant frequencies and sensitivity of MEMS cantilever-type structures, Journal of Optoelectronics and Advanced Materials Vol. 16, Iss. 5-6, pp. 579-590 (2014)