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Laser direct writing and mask lithographic produced polymeric integrated optics

ANDRE HEßKE1,* , THOMAS BODENDORFER1, MATHIAS S. MÜLLER1, ALEXANDER W. KOCH1

Affiliation

  1. Institute for Measurement Systems and Sensor Technology, Technische Universität München, Theresienstr. 90/N5, 80333 Munich, Germany

Abstract

Integrated optics is an efficient tool for fast producing waveguides. We developed two different processes adopted for providing waveguides in polymeric integrated optics: (1) a direct UV-laser writing lithographic assembly and (2) a (direct contact) mask lithographic setup. Both are photochemical processes and use different stacked polymer layers (Ormocer® ), which shall be structured. We compare the properties of both assemblies and reveal several advantages and disadvantages: the direct laser ray is more variable, but less precise; the mask production is faster and more reproducible, but there are only a few opportunities to change the manufactured structures. In fact, when there is no good base in form of proper coatings, the process to create waveguides is difficult to realise, no matter which system is used..

Keywords

Integrated optics, Laser direct writing, Mask lithography, Ormocer®.

Submitted at: June 14, 2011
Accepted at: Sept. 15, 2011

Citation

ANDRE HEßKE, THOMAS BODENDORFER, MATHIAS S. MÜLLER, ALEXANDER W. KOCH, Laser direct writing and mask lithographic produced polymeric integrated optics, Journal of Optoelectronics and Advanced Materials Vol. 13, Iss. 9, pp. 1130-1134 (2011)