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Layout for millimeter wave Composite Right/Left Handed devices obtained by femtosecond laser ablation

M. ZAMFIRESCU1,* , G. SAJIN2, A. BUNEA2, F. CRACIUNOIU2, S. SIMION2, R. DABU1

Affiliation

  1. NILPRP – Bucharest, Atomistilor 409, 077125 Magurele, Romania
  2. IMT Bucharest, Str. Erou Iancu Nicolae 126A, 077190 Bucharest, Romania

Abstract

In this paper, design and fabrication of Composite Right/Left-Handed (CRLH) structures for metamaterial based millimeter wave (MMW) devices and circuits are presented. Coplanar waveguide transmission lines working at tens of GHz, were obtained by laser ablation of thin gold films deposied on silicon. The samples are precisely processed by tightly focusing a femtosecond laser beam with 200 fs pulse duration, 775 nm wavelength, energy of hundreds of nJ per pulse, and repetition rate of 2 kHz. A 2D structure is generated by translating the sample according to a computed design. The lateral dimension of the lines removed by the laser from the evaporated film is controlled by adjusting the laser intensity and the focus position. Using this technique, the fabrication of micro-structures for millimeter wave devices is demonstrated..

Keywords

Laser ablation, Millimeter wave, CRLH circuits.

Submitted at: June 20, 2009
Accepted at: Feb. 27, 2010

Citation

M. ZAMFIRESCU, G. SAJIN, A. BUNEA, F. CRACIUNOIU, S. SIMION, R. DABU, Layout for millimeter wave Composite Right/Left Handed devices obtained by femtosecond laser ablation, Journal of Optoelectronics and Advanced Materials Vol. 12, Iss. 3, pp. 686-691 (2010)