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Mechanical and decorative properties of ZrOx thin films prepared by reactive-magnetron sputtering

M. APREUTESEI1, R. ARVINTE1, D. CONSTANTIN1, O. C. ANDREI2, D. MUNTEANU1

Affiliation

  1. Dept. of Technological Equipment and Materials Science, Transilvania University, 500036 Brasov - Romania
  2. Dept. of Removable Partial Denture, University Carol Davila, Bucharest, Romania

Abstract

Within the frame of this work is zirconium oxide - ZrOx decorative thin films were deposited by reactive magnetron sputtering. These films have been characterized in terms of some proprieties as films colour, mechanical properties, thickness and composition, taking into account the influence of certain deposition parameters such as: reactive gas flow (O2) and deposition time. Regarding the composition, the obtained films are characterized by two zones, one rich in Zr which leads to various metallic colours of the films and the second zone rich in O2, which lead to some interference colour of the films. The hardness increase with the increase of reactive gas flow until 15 GPa for ZrOx coatings deposited at 2000 C..

Keywords

Zirconium oxide, Reactive Sputtering, Composition, Properties..

Submitted at: March 10, 2011
Accepted at: July 25, 2011

Citation

M. APREUTESEI, R. ARVINTE, D. CONSTANTIN, O. C. ANDREI, D. MUNTEANU, Mechanical and decorative properties of ZrOx thin films prepared by reactive-magnetron sputtering, Journal of Optoelectronics and Advanced Materials Vol. 13, Iss. 7, pp. 897-901 (2011)